SU8600

The SU8600’s high-brightness cold-field emission source provides exceptional resolution, even at low voltages. This lets you capture intricate details with clarity, making it ideal for advanced material science, semiconductor studies, and biological analysis.

The narrow energy width (almost monochromatic) emission minimizes chromatic aberrations, so you can operate the SU8600 without beam boosting.

Multiple signals emitted from the observed specimen are collected by the magnetic lens field and guided into the in-column, multi-detector system. This system lets you display up to six imaging signals at the same time.

The Out-Column Crystal Type BSED (OCD) enables fast backscattered electron imaging (BSE), capturing structural details in under one second. So you save time while distinguishing material differences with precision, such as oxide and nitride layers in semiconductors.

That’s not all. High-pass filtering for elastically backscattered electrons allows material contrast imaging without deep beam penetration. You’re able to maintain sample integrity while observing surface-level features, crucial for delicate specimens or beam-sensitive materials.

Energy filtering also gives you the following benefits:

• You can easily suppress image charging by selecting faster, non-charge-affected electrons.
• You can image surfaces with different conductivities, e.g. doping regions in semiconductors.
• You can image SE or filtered-SE (fine surface detail) or elastically backscattered electrons (material contrast information) at the same time.
• You can apply a window-less EDX system at all accelerating voltages, since the magnetic field prevents backscattered electrons from hitting the EDX detector where they would cause spectrum background.

The optional EM Flow Creator software lets you use a “drag and drop” method to configure SEM operations into repeatable workflows. Once a recipe is configured, automated data collection under set conditions can be done with high accuracy and repeatability. So you get consistent results with minimal manual intervention, which is perfect for labs managing high-throughput experiments.

Display up to six signals at the same time on a single monitor so you can analyze data efficiently. Or use a dual monitor configuration to expand your workspace with extra display options.

The standard six-inch specimen exchange chamber with optional inert-gas transfer mechanism lets you minimize contamination risks while accommodating a wide variety of sample types.

Using the exchange chamber lets you keep the chamber permanently under vacuum, ensuring minimal background contamination. The stage itself boasts a 110 mm x 110 mm range of motion in X and Y.