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SU9600

SU9600 (T)SEM

The unique transmission-optimized SEM, for advanced nanomaterials analysis
  • Combines the capabilities of analytical STEM and UHR-SEM in one high stability platform
  • Ultra high-resolution imaging from 10v to 30kV, for incredible surface and structural studies across a wide range of materials
  • Cold field emission gun, full-immersion objective lens and TEM sample stage combine to make the SU9600 the world’s highest resolution SEM (0.34nm guaranteed, ~0.2nm achievable)
  • Comprehensive reflected and transmitted electron detection with energy and angular filtering
  • Correlate surface information using SE/BSE with transmitted electron information from BF/ADF/EELS/4D-STEM
  • Sub-nm elemental analysis with high solid angle windowless EDS
  • Study fundamental material properties with EELS and 4D-STEM

Overview

The new-concept SU9600 is a modular microscope perfectly suited to analyzing nanomaterials, 2D materials and semiconductors. Bridging the gap between SEM and TEM, the SU9600 provides unique capabilities by combining UHR-SEM, STEM, 4D-STEM*, EELS* and nano-EDS* together in one high-stability instrument. Perform high-resolution STEM imaging quicker than ever before or take a deep-dive into your material properties with multi-modal studies. All this is available alongside the capabilities of the world’s highest resolution SEM, allowing you to combine true surface information and transmitted-electron information - for better nanoscale understanding
* optional

Features and benefits

Applications gallery
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Elemental distribution along the nanowire can be visualised Courtesty of Prof Kimberly Dick Thelander, Lund University

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Surface morphology and grain structure can be observed

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Atomic-level lattice structure and diffraction pattern can be analysed

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Elemental distribution of Ag and Cu can be clearly identified Courtesy of Dr. Dai Mochizuki, Tokyo Institute of Technology

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Elemental composition can be visualised at the nanoscale

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Specifications

SE image resolution Secondary Electron Image Resolution:
0.4 nm @ 30 kV
1.0 nm @ 1 kV
0.6 nm @ Landing Voltage of 1 kV*1
STEM image resolution*2  0.34 nm @ 30 kV (lattice image)
Accelerating Voltage 0.5 to 30 kV
Landing Voltage*1  0.01 to 20 kV
Electrical image shift Up to ±5 µm (Specimen height = 0.0 mm)
Stage traverse X: ±4.0 mm, Y: ±2.0 mm, Z: ±0.3 mm, T: ±40°
Specimen size - Flat specimen stage 5.0 mm × 9.5 mm × 3.5 mm (H) (Max.)
Specimen size - Cross section specimen stage 2.0 mm × 6.5 mm × 5.0 mm (H) (Max.)

 

* 1: With optional deceleration holder and top detector.

* 2: Option

Contact us

The SU9600 is a powerful CFE-SEM platform that puts sub-nanometer resolution imaging within reach of any lab. Many of its capabilities, such as low kV STEM and EELS, are traditionally available only using a 200-300 kV TEM. Our experts can guide you through every aspect, from sample prep strategies to low-kV imaging workflows and analytical STEM. Want to learn more? Let's talk.

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