SU9600

SU9600

Bridging the Gap Between SEM and TEM
  • NEG* cold field-emission electron source.
  • 0.4 nm resolution at 30 kV and 0.6 nm at 1 kV - the world's highest SEM resolution.
  • Super ExB technology: Get images with excellent signal-to-noise ratio and contrast, even at low probe-currents.
  • Low-aberration magnetic immersion lens with upper and lower pole-piece.

* Non-Evaporable Getter
  • Complete lineup of detectors to collect secondary electron (SE), backscattered electron (BSE), bright and dark field transmission electron (BF-TE, DF-TE) signals.
  • Low-kV STEM, EDX and EELS analysis.
  • 0.34 nm STEM resolution guaranteed, 0.2 nm attainable
  • Enhanced scanning capabilities and EMFC** for faster, automated workflows.

** Electron Microscopy Flow Creator software

Overview

Decreasing feature sizes in materials science means nanometer-scale imaging and analysis with SEM is more crucial today than ever. Hitachi High-Tech Co. has developed the SU9600 cold field emission scanning electron microscope (CFE-SEM), boasting the world's highest SEM resolution of 0.4 nm at 30 kV. You can perform high resolution, low-kV STEM, EELS and diffraction analysis, techniques that were previously reserved for 200–300 kV TEMs.

Features and benefits

Applications gallery
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Nanoscale structure of single-wall carbon nanotubes can be clearly resolved

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Elemental distribution along the nanowire can be visualised Courtesty of Prof Kimberly Dick Thelander, Lund University

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Surface morphology and grain structure can be observed

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Atomic-level lattice structure and diffraction pattern can be analysed

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Elemental distribution of Ag and Cu can be clearly identified Courtesy of Dr. Dai Mochizuki, Tokyo Institute of Technology

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Elemental composition can be visualised at the nanoscale

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Layered structures and material interfaces can be clearly observed

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Internal features can be visualised using compositional contrast

Specifications

SE image resolution Secondary Electron Image Resolution:
0.4 nm @ 30 kV
1.0 nm @ 1 kV
0.6 nm @ Landing Voltage of 1 kV*1
STEM image resolution*2  0.34 nm @ 30 kV (lattice image)
Accelerating Voltage 0.5 to 30 kV
Landing Voltage*1  0.01 to 20 kV
Electrical image shift Up to ±5 µm (Specimen height = 0.0 mm)
Stage traverse X: ±4.0 mm, Y: ±2.0 mm, Z: ±0.3 mm, T: ±40°
Specimen size - Flat specimen stage 5.0 mm × 9.5 mm × 3.5 mm (H) (Max.)
Specimen size - Cross section specimen stage 2.0 mm × 6.5 mm × 5.0 mm (H) (Max.)

 

* 1: With optional deceleration holder and top detector.

* 2: Option

Contact us

The SU9600 is a powerful CFE-SEM platform that puts sub-nanometer resolution imaging within reach of any lab. Many of its capabilities, such as low kV STEM and EELS, are traditionally available only using a 200-300 kV TEM. Our experts can guide you through every aspect, from sample prep strategies to low-kV imaging workflows and analytical STEM. Want to learn more? Let's talk.

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