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Application Note

EM Flow Creator: 40,412 particles measured. One recipe. Fully automated

Statistically robust particle-size distribution needs hundreds of images. And hundreds of images usually means a microscopist tied to the instrument all day.

In this application note, Hitachi engineers used EM Flow Creator to acquire 100 images of slurry SiO₂ abrasive at 100,000× in 53 minutes, then measured every particle automatically. Automation shouldn't stop at acquisition.

One hundred SEM images is a lot of data to measure by hand. Manual measurement introduces exactly the operator variability that automated acquisition removes. In this workflow, the images were passed to Image-Pro 10 (Media Cybernetics Inc.) for automated measurement. The software binarises each image, applies watershed processing to separate closely spaced particles that would otherwise be counted as one, and measures particle dimensions across the full dataset.
App note mock up_EMFC_1


Inside the application note:
  • Full observation conditions: SU8700 FE-SEM, 3.0 kV, 100,000×, UD(SE) signal
  • The EM Flow Creator GUI and the block sequence used to build the acquisition flow
  • An automatically acquired SEM image of the SiO₂ slurry particles
  • The complete particle-size distribution histogram across 40,412 particles
  • Recommended instrument and software configuration

Authors: Saki Fukushima and Atsushi Miyaki, Hitachi High-Tech Corporation