Get highly detailed information for applications ranging from sub-nanometer imaging and analysis in R&D, to speedy and safe sample characterization and process control in industry.

Both models feature a high-brightness, high-stability Schottky field emission source. The source is combined with full range beam boosting and an electrostatic-magnetic hybrid objective lens. So you can achieve sub-nanometer resolution without magnetic sample interaction.

You also get superb lateral resolution without needing stage bias voltage, extending high-resolution imaging to non-flat specimens. Achieve resolution down to 0.6 nm (SU8700) and 0.8 nm (SU7000).

The optional variable pressure mode, which is accessed with a simple mouse click and without needing any apertures, helps to investigate non-conductive specimens under high-current, high-voltage conditions and eliminates the need for specimen coating.

Extra-wide field, or multi-field, EDS and EBSD analysis is supported by an optional package allowing for highly accurate scan field linearity and orthogonality under 70° stage tilt. So you can generate (as an example) EBSD mapping mosaics with excellent matching quality.

Gather more data in less time, ensuring complete analysis for complex samples. Equipped with advanced secondary and backscattered electron detectors, both SEMs support simultaneous acquisition of up to six signal types and EDS elemental information at the same working distance of just 6 mm. This also includes simultaneous collection of in-column SE/BSE together with optional STEM signals.

Optional live viewing, signal enhancement processing supports you during feature search and image preparation, letting you fully optimize image signals at the time of capture.

Simplify repetitive tasks and improve reproducibility. You’re free to focus on high-priority analyses because the optional EM Flow Creator software allows drag-and-drop configuration of workflows. Automated tasks like stage alignment, recipe-based imaging, and pattern-recognition-based fine positioning, are available, saving valuable operator time.

Conduct experiments on specimens of varying sizes with ease:

• The SU8700 is tailored for high-throughput applications, featuring a 6-inch specimen exchange chamber for fast sample loading and handling specimens up to 150 mm in diameter.
• The SU7000 boasts a larger chamber with eucentric stage movement, accommodating specimens up to 200 mm diameter and 80 mm in height. The SEM also comes with 18 access ports, including two cabling ports in the chamber door, for connecting optional accessories.

Optimize your workflow with a user-friendly, customizable interface that improves navigation and decision-making. Both models offer an optional dual-monitor setup with customizable display modes.

Operators can view, compare and record up to six signals simultaneously using the same working distance. Chamber-mounted colour cameras capture specimen images, enabling simple and accurate specimen navigation by just clicking the point of interest on the map.

Stage/sample collisions with an EDX, BSE, or STEM detector are impossible: the chamber design, which includes both software and hardware interlocks, make the operation safe, even for inexperienced users.