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SU3800 / SU3900 Family

SU3800/3900 Universal Scanning Electron Microscope Family

Powerful, versatile VP-SEMs with a choice of electron source and specimen chamber size. Designed for performance, large-sample handling, and user-friendly automation imaging needs in academia and industry.
  • Accommodate and inspect large, heavy samples with ease
  • Flexible, robust sample stages for any application
  • Wide-area observation with SEM MAP technology
  • Automation for consistent, high-quality results
  • Designed for a variety of applications

What is the SU3800/3900 family?


The Hitachi SU3800/3900 family is a modular, user-friendly scanning electron microscope platform with variable chamber pressure capabilities. This modular design means you can configure the best instrument for your application:
Choose your Electron Source
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Tungsten Hairpin Filament

Cost-effective option for low to medium-demand imaging requirements

The SU3800T or SU3900T

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Schottky Field Emitter

High-performance option boosted by beam deceleration technology, for high-resolution imaging

The SU3800SE or SU3900SE

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Choose your sample chamber size
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Standard-size

Up to 200mm Ø, 80mm (H), 2kg sample weight

The SU3800T or SU3800SE

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Jumbo-size

Up to 300mm Ø, 130mm (H), 5kg sample weight

The SU3900T or SU3900SE

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Why choose the SU3800/3900 platform?

The Hitachi SU3800T/3900T and SU3800SE/3900SE scanning electron microscopes are designed to tackle the challenges of modern microscopy - whether you’re working in academic research, industrial labs, or quality control environments. These instruments offer the perfect balance between versatility, high performance and ease of use, letting you focus on what matters: getting reliable, accurate results every time.

Both base models are equipped to handle a wide range of sample sizes and types, from small specimens to large, heavy industrial components. With advanced automation features and powerful navigation tools, the instruments in the SU3800/3900 series help you streamline your workflows, improve productivity, and achieve consistent, high-quality results.

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Features and benefits

Applications gallery

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Fracture surface of iron wire

5.00kV x9.00k SE

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Stainless steel SUS316

30.00kV x50.0k BSE

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Printed circuit board

0.50kV x12.00k SE

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Cross section of layered ceramic capacitor

2.00kV x5.00k BSE

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Zinc oxide particles

3.00kV x70.0k SE

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High-entropy carbide film

1.50kV-D x50.0k BSE

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Lithium-ion battery cathode material

2.00kV x3.00k BSE

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Lithium-ion battery anode material

0.20kV-D x10.0k BSE

Specifications

  Tungsten hairpin Schottky FE
SU3800T SU3900T SU3800SE SU3900SE
Electron source Tungsten hairpin Tungsten hairpin Schottky FE Schottky FE
Accelerating voltage 0.3 - 30kV 0.3 - 30kV 0.5 - 30kV 0.5 - 30kV
Landing voltage (beam deceleration) na na 0.1 - 2.0kV 0.1 - 2.0kV
Secondary Electron image resolution 3.0nm @ 30kV
15nm @ 1kV
3.0nm @ 30kV
15nm @ 1kV
0.9nm @ 30kV
2.5nm @ 1kV
1.6nm @ 1kV (decel)
0.9nm @ 30kV
2.5nm @ 1kV
1.6nm @ 1kV (decel)
Eucentric Specimen stage X: 0-100mm
Y: 0-50mm
Z: 5-65mm
T: -20° to +90°
R: 360°
X: 0-150mm
Y: 0-150mm
Z: 5-85mm
T: -20° to +90°
R: 360°
X: 0-100mm
Y: 0-50mm
Z: 5-65mm
T: -20° to +90°
R: 360°
X: 0-150mm
Y: 0-150mm
Z: 5-85mm
T: -20° to +90°
R: 360°
Maximum mountable specimen diameter 200mm diameter 300mm diameter 200mm diameter 300mm diameter
Maximum observable specimen diameter SEM and Navigation Cam 130mm 229mm 130mm 229mm
Maximum specimen height with all stage axes active 80mm 130mm 80mm 130mm
Maximum specimen mass 2kg 5kg (all stage axes usable when using proper specimen holder) 2kg 5kg (all stage axes usable when using proper specimen holder)

FAQs

  • What is the SU3800/3900 microscope family?

    The SU3800 and SU3900 SEMs provide reliable, high-quality imaging across a range of sample types. The SU3800/3900 is a modular platform that lets you choose the modules/components best suited for your work. You can choose:

    • A tungsten source for routine imaging (SU3800T and SU3900T)
    • A Schottky field emitter for high-resolution performance (SU3800SE and SU3900SE)
    • A standard chamber (SU3800)
    • A large chamber for bigger samples (SU3900)
  • What is the difference between the SU3800 and SU3900?

    Both models offer the same software, detectors, and usability features. The difference is sample size capacity. If you work with industrial parts, geological specimens, or large materials that are difficult to cut, the SU3900 is the best fit due to the larger chamber size.

    SU3800

    • For standard-size samples
    • Accepts specimens up to 200 mm diameter, 80 mm height, and 2 kg mass

    SU3900

    • For large, heavy, or irregular specimens
    • Accepts specimens up to 300 mm diameter, 130 mm height, 5 kg mass
  • Which electron source should I choose?

    Both options are designed to deliver strong, stable imaging.

    Tungsten filament

    • Ideal for routine or moderate-demand imaging
    • Cost-effective to maintain

    Schottky field emitter

    • Higher brightness and stability
    • Sharper images at high and low kV
    • Recommended for high-resolution, fine-detail work
  • Can I load large or heavy samples?

    Yes. That’s one of the key strengths of this platform.

    The SU3900 can handle specimens up to 300 mm in diameter, 130 mm in height, and masses up to 5 kg. It’s ideal for automotive parts, metals, composites, and any material that’s difficult or impossible to cut down.

  • How does the stage help with imaging?

    Both models use an advanced eucentric stage that keeps your area of interest in focus even as the sample is tilted. The SU3900 stage also includes a stabilizing mechanism designed for high-resolution imaging under heavy loads.

    Features include:

    • Five degrees of movement (X, Y, Z, tilt, rotation)
    • Smooth handling of large and heavy specimens
    • The ability to tilt from -20° to +90°
    • Full 360° rotation for flexible viewing angles
  • Is the instrument safe for new users?

    Yes. The system includes built-in safeguards that prevent accidental collisions.

    The instrument automatically restricts movement to safe ranges. The microscope guides stage motion so you can use short working distances without risk. So it’s suitable for shared labs and teams with mixed experience levels.

  • How do I navigate large samples inside the chamber?

    Both models include SEM MAP technology.

    This feature:

    • Captures an optical image of the entire sample area during evacuation
    • Shows you exactly where you are on the specimen
    • Allows point and click navigation
    • Lines up rotation between the optical photo and SEM image
  • What detectors are available?

    Depending on your configuration, you can use:

    • Secondary electron detector
    • Backscatter detector (retractable, multi-segment)
    • Optional low vacuum SE detector
    • Optional cathodoluminescence detection
    • Multiple ports for EDS, WDS, EBSD, and other accessories

    This flexibility supports everything from basic surface imaging to advanced analytical work.

  • Does the microscope support low vacuum imaging?

    Yes. The SU3800/3900 platform supports both high vacuum and low vacuum modes. Low vacuum is ideal for non-conductive or outgassing samples that cannot be coated.

  • Can the microscope automate my imaging workflow?

    Yes. Automation is one of the biggest advantages of the platform.

    You can automate optical alignment, focus, contrast and brightness, stigmation, and entire multi-step imaging workflows

    And with the optional EM Flow Creator software, you can also build custom automated routines for multi-sample or multi-location imaging without any coding experience.

  • What applications are these microscopes suited for?

    Optional stages and detectors make the platform suitable for both routine tasks and more advanced analytical work, including:

    • Automotive materials analysis
    • Metals and alloys
    • Geology and mining
    • Polymers and composites
    • Nanotechnology
    • Industrial quality control
    • Biomaterials
  • Can I expand the system in the future?

    Yes. The platform is modular, so you can add detectors, stages, or analytical tools as your needs change. Common additions include heating and cooling stages, tensile testing stages, in situ holders, and extra EDS or EBSD detectors.

  • Who is this system designed for?

    The SU3800/3900 family is ideal for:

    • Labs that handle a wide range of specimen sizes
    • Teams that need stability during long imaging sessions
    • Users who want automation to save time
    • Labs with mixed experience levels
    • Industrial users who want to skip sample cutting
    • Research groups needing analytical flexibility
  • Where can I get help choosing the right configuration?

    If you are unsure which chamber size, electron source, or detector setup is right for your work, speak with a Hitachi applications specialist. They can help match the instrument to your sample types and resolution needs.

    Speak to an applications expert or book a demo today.

Contact us

If you would like help choosing the best SEM for your needs, or if you’re looking for advice on how to optimise your microscopy, our experts are ready to assist. Contact us today to learn how the Hitachi SU3800/3900 family can enhance your lab’s capabilities.