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SU3800/3900 Universal Scanning Electron Microscope Family

Powerful, versatile VP-SEMs with a choice of electron source and specimen chamber size. Designed for performance, large-sample handling, and user-friendly automation.
Product family features
  • Accommodate and inspect large, heavy samples with ease
  • Flexible, robust sample stages for any application
  • Wide-area observation with SEM MAP technology
  • Automation for consistent, high-quality results
  • Designed for a variety of applications

What is the SU3800/3900 family?


The Hitachi SU3800/3900 family is a modular, user-friendly scanning electron microscope platform with variable chamber pressure capabilities. This modular design means you can configure the best instrument for your application:

Choose your Electron Source
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Tungsten Hairpin Filament

Cost-effective option for low to medium-demand imaging requirements

The SU3800T or SU3900T

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Schottky Field Emitter

High-performance option boosted by beam deceleration technology, for high-resolution imaging

The SU3800SE or SU3900SE

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Choose your sample chamber size
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Standard-size

Up to 200mm Ø, 80mm (H), 2kg sample weight

The SU3800T or SU3800SE

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Jumbo-size

Up to 300mm Ø, 130mm (H), 5kg sample weight

The SU3900T or SU3900SE

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Why choose the SU3800/3900 platform?

The Hitachi SU3800T/3900T and SU3800SE/3900SE scanning electron microscopes are designed to tackle the challenges of modern microscopy - whether you’re working in academic research, industrial labs, or quality control environments. These instruments offer the perfect balance between versatility, high performance and ease of use, letting you focus on what matters: getting reliable, accurate results every time.

Both base models are equipped to handle a wide range of sample sizes and types, from small specimens to large, heavy industrial components. With advanced automation features and powerful navigation tools, the instruments in the SU3800/3900 series help you streamline your workflows, improve productivity, and achieve consistent, high-quality results.

Features and benefits

Applications gallery

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Fracture surface of iron wire

5.00kV x9.00k SE

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Stainless steel SUS316

30.00kV x50.0k BSE

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Printed circuit board

0.50kV x12.00k SE

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Cross section of layered ceramic capacitor

2.00kV x5.00k BSE

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Zinc oxide particles

3.00kV x70.0k SE

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High-entropy carbide film

1.50kV-D x50.0k BSE

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Lithium-ion battery cathode material

2.00kV x3.00k BSE

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Lithium-ion battery anode material

0.20kV-D x10.0k BSE

SU3800SE-SU3900SE

Related resource

Introducing Hitachi's SU3800SE and SU3900SE SEMs: Simplifying microscopy with easy, automatic operation.

Read the article

Specifications

  SU3800 SU3900
SU3800T SU3900T SU3800SE SU3900SE
Electron source Tungsten hairpin Tungsten hairpin Schottky FE Schottky FE
Accelerating voltage 0.3 - 30kV 0.5 - 30kV 0.3 - 30kV 0.5 - 30kV
Landing voltage (beam deceleration) na 0.1 - 2.0kV na 0.1 - 2.0kV
Secondary Electron image resolution 3.0nm @ 30kV
15nm @ 1kV
0.9nm @ 30kV
2.5nm @ 1kV
1.6nm @ 1kV (decel)
3.0nm @ 30kV
15nm @ 1kV
0.9nm @ 30kV
2.5nm @ 1kV
1.6nm @ 1kV (decel)
Eucentric Specimen stage X: 0-100mm
Y: 0-50mm
Z: 5-55mm
T: -20° - 90°
R: 360°
X: 0-150mm
Y: 0-150mm
Z: 5-65mm
T: -20° - 90°
R: 360°
Maximum mountable specimen diameter 200mm diameter 300mm diameter
Maximum observable specimen diameter SEM and Navigation Cam 130mm 229mm
Maximum specimen height with all stage axes active 80mm 130mm
Maximum specimen mass 2kg 5kg (all stage axes usable when using proper specimen holder)

Speak to our experts

If you would like help choosing the best SEM for your needs, or if you’re looking for advice on how to optimize your microscopy, our experts are ready to assist. Contact us today to learn how the Hitachi SU3800/SU3900 series can enhance your lab’s capabilities