Scanning electron microscopes (SEMs) pave the way for new scientific discoveries by helping researchers study the properties of materials and biological specimens. However, traditional SEMs often come with significant size and cost limitations, making them less accessible for many labs.
As technology has advanced, the demand for more compact yet powerful SEMs has grown, especially among labs looking to enhance their imaging capabilities without investing in a large, dedicated space.
The Hitachi FlexSEM II addresses this need by bridging the gap between tabletop convenience and full-scale performance.
This versatile tabletop or floorstanding SEM offers high-resolution imaging, versatile sample handling, and user-friendly operation in a compact, flexible package. It’s a smart choice for anyone looking to bring advanced microscopy into smaller labs or upgrade their current imaging setup without compromising on quality.
Figure 1: The FlexSEM II tabletop SEM
For many labs, the challenge lies in finding an SEM that balances size, cost, and performance.
Traditional tabletop SEMs are convenient but often lack the imaging capabilities needed for detailed analysis. On the other hand, full-scale SEMs deliver high performance but come with significant space, cost, and operational requirements.
The FlexSEM II offers a solution to these challenges by combining the best of both worlds—delivering high-resolution imaging in a compact, lab-friendly design.
Suitable for users of all experience levels, the intuitive interface and automation features simplify operation, making it accessible for newcomers, while customizable settings cater to the needs of more experienced researchers. Flexibility like this allows labs to achieve top-quality imaging without the steep learning curve associated with more complex SEMs.
The FlexSEM II supports a wide range of applications, from materials science and biological research to industrial quality control. Its advanced imaging capabilities and adaptable sample handling make it ideal for labs looking to expand their analysis capabilities, while staying within space and budget constraints.
Figure 2: Super-absorbent polymer. No metal coating applied. Low-vacuum mode 30Pa, SE signal (UVD)
The Hitachi FlexSEM II brings a host of advanced features to the compact SEM category. Here are the key features that make it an ideal solution for labs seeking high-quality imaging with a smaller footprint.
Compact design with full-scale performance
At just 45 cm wide, consisting only of a stackable set of an electrical support unit and a SEM unit, plus an external vacuum pump, the FlexSEM II is small enough to fit on a workbench or be used as a floor-standing unit.
Its compact size does not come at the expense of functionality; the system integrates high-performance electron optics and a sophisticated vacuum system.
Whether your lab has limited space or requires mobility, the FlexSEM II offers the flexibility to accommodate different installation setups while delivering the capabilities typically found in larger SEMs.
High-resolution imaging capabilities
Achieving a SE resolution of 4 nm at high vacuum, the FlexSEM II excels in providing detailed images for a wide range of specimens.
With an accelerating voltage range from 300V to 20kV, the system allows researchers to fine-tune imaging conditions for different sample types and requirements. Such versatility is especially beneficial for labs that need to examine fine surface structures at low accelerating voltages or perform detailed material analysis across various magnifications.
Figure 3: Toner particle, imaged at 5kV in high-vacuum mode with the Everhart-Thornley-SE detector. Magnification (polaroid base) is 20.000x.
Adaptable vacuum modes
The FlexSEM II features dual vacuum modes: A high-vacuum setting for observing conductive specimens and a low-vacuum mode with adjustable chamber pressures up to 100 Pa for non-conductive or moist samples.
This adaptability reduces the need for extensive sample preparation, enabling you to work efficiently with different materials, from biological tissues to advanced composites.
Advanced detection system
Besides an efficient high-vacuum SE detector, the multi-mode backscatter electron (BSE) detection system provides high-sensitivity imaging across different vacuum conditions and accelerating voltages.
The FlexSEM is equipped with five BSE detectors, including options for topographic and material contrast imaging. Also, the optional low-vacuum secondary electron detector (UVD) enhances imaging for non-conductive specimens.
A dual-channel display functionality lets you view and record two image channels simultaneously.
Figure 4: Examples of the different BSE imaging modes can be seen on the example of a rolled and briefly Ar ion beam polished Cu foil. Left: only grain orientation contrast without any topography is seen by the COMPO mode. Middle: by the 3D setup, sample topography (rolling traces) appear overlaid on the grain orientation contrast. Right :Pure topographical information is displayed by the TOPO mode.
The Hitachi FlexSEM II is designed with the user in mind, offering a range of features that make it easy to operate while delivering consistent, high-quality results. Its flexible operation modes and intuitive interface ensure users of all experience levels can achieve excellent imaging performance.
Ease of use for all skill levels
Whether you’re new to electron microscopy or an experienced researcher, the FlexSEM II adapts to your skill level.
The graphical user interface is clearly structured and customizable, so you don’t need to remember functions hidden in sub-menus. A user-friendly operating knob panel provides a straightforward way to operate all major SEM functions.
Beginners can start with pre-set imaging conditions based on common applications, such as surface topography or elemental analysis, allowing them to quickly capture quality images without needing extensive technical knowledge. For routine tasks, users can store custom settings in the recipe memory for quick access to frequently used configurations.
Figure 5: Basic FlexSEM graphical user interface, configured in single-screen mode. The SEM-Map function at the right side shows the colour navigation image, or optionally a second detector signal. At the lower right the thumbnail gallery of already recorded images is shown. Each image recording site can be revisited.
Meanwhile, advanced users can take full control over all imaging parameters, fine-tuning the system to suit their specific needs.
Automated functions to streamline workflows
The FlexSEM II includes standard and optional automated features that simplify and speed up common tasks.
The intelligent filament control automatically optimizes the filament saturation at each start of the electron beam, assuring stable emission and long filament lifetime.
Standard functions like auto-focus, auto-brightness, and contrast control help you achieve optimal imaging conditions in just seconds, significantly reducing the time needed for manual adjustments.
Optional functions like ZigZag-Capture, EM-Macro and EM Flow Creator offer functionality from automatic multi-field image acquisition to free workflow programming for repetitive, complex imaging tasks.
Smart navigation and stage control
Navigating samples is effortless with the FlexSEM's motorized specimen stage, which accommodates specimens up to 153 mm in diameter and 40 mm in height.
A trackball with a magnification-dependent response allows you to move the specimen stage with high accuracy in X,Y.
The SEM MAP function integrates an optical camera view with the SEM interface. Users can quickly locate and focus on areas of interest. The navigation system ensures that even large or complex samples can be easily explored, enhancing productivity and ensuring accurate imaging results.
Figure 6: For easy orientation on specimen tables and convenient stage navigation, the FlexSEM incorporates a
colour camera at the specimen chamber entrance. This camera acquires a high-resolution colour photo of any
specimen loaded and makes this image available in the “SemMap” navigation window.
The FlexSEM II goes beyond standard imaging capabilities and provides analytical options and accessories that cater to a wide range of research needs.
EDS integration for elemental analysis
For labs needing detailed elemental analysis, the FlexSEM II supports integration with energy dispersive X-ray spectroscopy (EDS) systems from leading providers such as Bruker and Oxford Instruments. Like the FlexSEM, these EDS detectors have a compact design and are fully confined within the FlexSEM housing.
These EDX systems enable precise detection of elemental composition, allowing for full material characterization. The option to choose different detector sizes up to 60mm2 ensures the setup can be tailored to the specific analytical needs of each lab, whether it’s high-resolution mapping of beam-sensitive materials or bulk sample analysis.
3D metrology and image processing
Take your analysis to the next level with the Hitachi Map 3D package, which adds powerful tools for 3D surface reconstruction, roughness measurement, and particle/pore or fiber analysis.
Using data from the FlexSEM’s multi-detector system, the software can generate detailed 3D surface models, allowing you to measure surface features and extract quantitative data such as step heights or texture parameters. The package also includes functions for stitching large high resolution images and color segmentation, so you can visualize complex sample features with ease.
Figure 7: Together with a proprietary height calibration routine, the optional Hitachi Map3D Software will reconstruct an accurate 3D surface model of the inspected sample region.
The FlexSEM II gives your lab advanced microscopy capabilities but also addresses practical concerns around cost and maintenance. It’s a cost-effective choice for labs looking to maximize their return on investment.
Low maintenance requirements
Designed for user-friendly maintenance, the FlexSEM II allows most routine tasks to be handled in-house without the need for specialized technicians.
For example, changing the tungsten filament is a straightforward process that can be completed in just a few minutes, thanks to the easy-to-access electron gun design and video-animated user guidance. The system’s stable optics and automated alignment ensure consistent performance over time, which reduces the frequency of service calls and minimizes downtime.
Cost-effective solution
Operating costs are a key consideration for every lab, and the FlexSEM II is built with this in mind. The system’s efficient power requirements and self-maintainable components help keep annual maintenance costs low, often below €1,000. This affordability, combined with the microscope's high-resolution imaging capabilities, offers a compelling alternative to full-scale SEMs, which need significant ongoing expenses for maintenance.
Energy efficiency
The FlexSEM II runs on standard power and can be fully powered down when not in use, restarting in less than five minutes. With an energy-efficient approach like this, you’ll lower operational costs and support sustainability initiatives, making the FlexSEM an attractive choice for labs seeking to lower their environmental impact.
The Hitachi FlexSEM II delivers an ideal blend of compact design, high-resolution imaging, and advanced features that cater to the needs of modern labs.
You get a practical solution for achieving high-quality microscopy without the space and cost requirements of traditional SEMs. With user-friendly operation, flexible analytical options, and low maintenance demands, the FlexSEM II stands out as a versatile and accessible tool for a wide range of applications.
To learn more about how the FlexSEM II can enhance your lab’s capabilities, or to see it in action, reach out to schedule a demo.