Hitachi High-Tech Europe

Electron Microscope Scripting and Automation Software: Why Manual Microscopy is Holding You Back

Written by Sample Author | Jun 11, 2026 8:34:07 AM

The modern lab is undergoing a fundamental shift, generating more data today than at any point in history.

But a critical bottleneck has emerged: the instrument is no longer the limiting factor. The operator is. As R&D models become more data-driven and high-throughput demands rise in sectors like semiconductor and battery manufacturing, the pressure for reproducibility has never been higher.

Current lab environments face a specific set of challenges:

  • Skill scarcity: Highly skilled electron microscope operators are hard to come by.
  • Human variability: Manual operation introduces inconsistencies between users.
  • Training time: It takes significant time and resources to bring new personnel up to the needed technical standard.

Electron microscope scripting and automation software helps to bridge this gap. The electron microscope, one a manual tool, can now be operated autonomously and collect massive quantities of data.


What is electron microscope scripting and automation software?


EM scripting and automation software allows labs to create, store, and execute precise observation “recipes” that run without manual intervention at every step.

Historically, achieving this meant having advanced coding knowledge. But a new generation of tools is lowering the barrier to entry through visual programming.

Instead of writing lines of complex code, you’re able to build workflows by dragging and dropping “procedural blocks.” These modern tools combine instrument control—such as stage movement and beam management—with advanced image recognition and conditional logic.

Key characteristics of this software include:

  • Visual programming: Users sequence blocks to define a workflow, making automation accessible to non-programmers.
  • Conditional logic: The software can make “decisions” during a run, such as branching to a different step if a specific feature is detected.
  • Python functionality: Power users can execute Python scripts which ensures that even the most custom research needs can be met.
  • Integrated recognition: Built-in algorithms identify specific structures so the microscope can adjust its own field of view.

Why automate electron microscopy?


From the perspective of a lab manager or lead scientist, automation is about more than just convenience. It’s about maximizing the use of expensive instrumentation and getting the most out of your microscope. By implementing electron microscope scripting and automation software, labs can realize several core strategic benefits:

  • Added throughput: Labs acquire significantly more images across a higher volume of samples in less time, increasing capacity without hiring extra headcount.
  • Improved reproducibility: Automation removes operator-to-operator variability; because every sample is subjected to the same observation recipe, the resulting data is consistent and reliable.
  • Managing complexity: Multi-step workflows—including tedious adjustments like focus, brightness/contrast, and astigmatism correction—are executed perfectly every time, regardless of the hour or operator fatigue.
  • Operator freedom: By offloading repetitive acquisition tasks to software, skilled scientists are freed to focus on high-level data interpretation and critical R&D decision-making.
  • Data-driven R&D: Modern research needs massive, consistently acquired datasets to feed into AI and machine learning models. Automation makes the generation of these large-scale datasets feasible.

Introducing Hitachi EM Flow Creator


To address these needs, Hitachi High-Tech developed EM Flow Creator, a sophisticated software package designed to automate SEM and TEM workflows across a wide range of application fields. It’s engineered to be flexible enough for routine quality control, yet powerful enough for the most demanding research environments.

How it works: Visual programming


Typical observation workflow and its description in EM Flow Creator.
(a) Screenshot of EM Flow Creator session. (b) Outline of observation workflow.

The hallmark of EM Flow Creator is its intuitive drag-and-drop interface. Users create “recipes” by selecting procedural blocks from a comprehensive list.

These blocks are sequenced in the recipe area, letting you automate complex procedures with no coding needed.

Key capabilities include:

  • Sophisticated logic: The software supports sequential execution, looping, and conditional branching, allowing the microscope to respond dynamically to what it “sees”.
  • Intelligent image recognition: Integrated algorithms enable the tool to search for specific features and automatically adjust the field of view to center on targets of interest
  • Broad compatibility: EM Flow Creator is now compatible with all Hitachi electron microscope platforms.
  • Python options: While the visual interface handles most tasks, advanced users can execute custom Python scripts to extend functionality for highly specialized needs.

Whether you’re managing a semiconductor fab, a battery manufacturing line, or a life science research facility, EM Flow Creator provides the stability and scalability you need to streamline your data acquisition.

Automation in action: Real-world case studies with EM Flow Creator


This section outlines a few ways EM Flow Creator can be used in your lab. Through this kind of EM automation software, labs have transitioned from manual, labor-intensive tasks to streamlined, autonomous workflows. Let’s look at a few examples of this.

1. Lithium-ion battery (LiB) analysis


Automated observation of positive-electrode material for lithium-ion battery
(a) Outline of observation workflow. (b) 500× secondary electron image. (c) 5k× secondary/backscattered electron image.(d) 35k× secondary/backscattered electron image. (Instrument: SU8700. Accelerating voltage: 1 kV. Detectors: Upper and Middle detectors.)

In battery research, understanding the morphology of active materials and separators is crucial for performance and safety.

  • Active material particles: Traditionally, finding and imaging specific particles at high magnification is like finding a needle in a haystack. Using EM Flow Creator’s image recognition blocks, the system can automatically search a wide area, identify target particles based on shape or contrast, and then automatically zoom in to capture high-resolution images.
  • Separator pore structure: Comparing pore structures across different manufacturing conditions means massive datasets. Automation allows for the sequential observation of multiple specimens at 100,000x magnification. So the data collected is statistically significant and free from operator bias.

2. Semiconductor device inspection


Automated cross-sectional observation of semiconductor device patterns.
(a) Observation workflow. (b) Secondary-electron image at 800× magnification. (c) Secondary-electron image at 250,000× magnification. (Instrument: SU9000II. Accelerating voltage: 5 kV. Detector: Upper detector.)

A common task in semiconductor material analysis is the sequential cross-sectional observation of device patterns.

In one case study, EM Flow Creator successfully captured 56 high-quality images in just 15 minutes. For a human operator, maintaining the needed focus and alignment for 56 consecutive shots is mentally exhausting and prone to error. The software, however, executed the routine with perfect stability.

3. Bio-sensing and life sciences


Automated observation of electrode-gap sensor for virus measurement.
(a) Optical microscope image and schematic diagram of electrode gap. (b) Secondary-electron image at 10,000× magnification. (c) Secondary-electron image at 300,000× magnification. (Instrument: SU8600. Accelerating voltage: 3 kV. Detector: Upper detector.)

Automation is equally transformative in the life sciences, where finding minute biological structures across a large substrate is a common hurdle.

Researchers used automation to measure viruses captured in an electrode-gap sensor. By automatically navigating 330 different observation fields, the software saved approximately 2.5 hours of manual labor per sample.

This allowed the researchers to focus on the biological implications of the data rather than the mechanics of the microscope.

Conclusions


As R&D and quality control move toward a more data-centric future, electron microscope scripting and automation software is no longer a luxury.

Tools like EM Flow Creator give you a practical, accessible path to automation that scales with your needs.

By providing a repeatable, high-speed data production pipeline through EM automation, you empower your team to focus on what matters most: discovery and innovation.